LASER SENSOR AND METHOD OF MANUFACTURING A LASER SENSOR

• Main Authors: Nevou, Laurent, Seurin, Jean Francois, Geiger, Jens, Mauthe, Svenja
• Format: Patent
• Language: English
• Published: 22.02.2024
• Subjects: ANALOGOUS ARRANGEMENTS USING OTHER WAVES; BASIC ELECTRIC ELEMENTS; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; DEVICES USING STIMULATED EMISSION; ELECTRICITY; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION ORRERADIATION OF RADIO WAVES; MEASURING; PHYSICS; RADIO DIRECTION-FINDING; RADIO NAVIGATION; TESTING

A self-mixing interferometric, SMI, laser sensor comprises a vertical cavity surface emitting laser, VCSEL, configured to emit laser radiation, the VCSEL comprising a first distributed Bragg reflector, DBR, a second DBR and a cavity region including an active light generation region, wherein the cavity region is arranged in a layer structure between a front side of the first DBR and a back side of the second DBR. Therein at least one of the first and second DBR comprises a first contrast region and a second contrast region, the first contrast region having a first refractive index contrast Δn1 regarding an emission wavelength of the VCSEL and the second contrast region having a second refractive index contrast Δn2/n larger than the first refractive index contrast Δn1/n.