Superresolution Metrology Methods based on Singular Distributions and Deep Learning
Methods for determining a value of an intrinsic geometrical parameter of a geometrical feature characterizing a physical object, and for classifying a scene into at least one geometrical shape, each geometrical shape modeling a luminous object. A singular light distribution characterized by a first...
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Main Author | |
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Format | Patent |
Language | English |
Published |
22.02.2024
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Subjects | |
Online Access | Get full text |
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