INTERLOCK SYSTEM FOR PROCESSING CHAMBER EXHAUST ASSEMBLY
Exemplary semiconductor processing systems may include a gas source coupled with a number of processing chambers. The gas source may include a controller. Each chamber may include an exhaust assembly having a foreline and a pump. The systems may include at least one abatement system coupled with eac...
Saved in:
Main Authors | , , , , , , , , |
---|---|
Format | Patent |
Language | English |
Published |
08.02.2024
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Be the first to leave a comment!