INTEGRATED CIRCUIT WITH FEOL RESISTOR

• Main Authors: HUANG, Tien-Chien, CHANG, Chih-Hsien, SHEEN, Ruey-Bin
• Format: Patent
• Language: English
• Published: 14.12.2023
• Subjects: BASIC ELECTRIC ELEMENTS; CALCULATING; COMPUTING; COUNTING; ELECTRIC DIGITAL DATA PROCESSING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PHYSICS; SEMICONDUCTOR DEVICES

A method includes forming a shallow trench isolation (STI) region in a semiconductor substrate thereby defining an active region and a passive region in the semiconductor substrate and spaced apart from each other by the STI region, forming a first sacrificial gate structure over the active region a...