METHODS OF FORMING MICROELECTRONIC DEVICES

A microelectronic device may include a source structure and a stack structure. The stack structure may include a vertically alternating sequence of insulative structures and conductive structures. Filled slits may extend through the stack structure and into the source structure, the slits dividing t...

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Bibliographic Details
Main Authors Shepherdson, Justin D, Carter, Chet E, Howder, Collin
Format Patent
LanguageEnglish
Published 30.11.2023
Subjects
ELECTRICITY
Online AccessGet full text

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