INSPECTION APPARATUS AND INSPECTION METHOD

• Main Authors: YAHATA, Masahito, IWAMA, Tatsuya, KATAOKA, Tatsuya, MASUDA, Yuichi, NAMIKAWA, Nobuhiro, MAEDA, Kazuma, NAKAMORI, Akioki
• Format: Patent
• Language: English
• Published: 02.11.2023
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

An inspection apparatus includes a measurement unit, a flow-in tube for flow of sample water into the measurement unit, a connection portion that connects a sample tube and the measurement unit to each other, a liquid sending portion that sends sample water to the measurement unit, a pressurization...