DRYING METHOD
A drying method includes an initial decompressing and temperature-lowering step of decompressing the chamber and lowering an air temperature inside the chamber by operating a decompression pump; and a drying cycle step that is repeatedly performed a plurality of times to dry an object to be dried af...
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Main Author | |
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Format | Patent |
Language | English |
Published |
02.11.2023
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Subjects | |
Online Access | Get full text |
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