DRYING METHOD

A drying method includes an initial decompressing and temperature-lowering step of decompressing the chamber and lowering an air temperature inside the chamber by operating a decompression pump; and a drying cycle step that is repeatedly performed a plurality of times to dry an object to be dried af...

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Bibliographic Details
Main Author TANAKA, Tatsumi
Format Patent
LanguageEnglish
Published 02.11.2023
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