DRYING METHOD

A drying method includes an initial decompressing and temperature-lowering step of decompressing the chamber and lowering an air temperature inside the chamber by operating a decompression pump; and a drying cycle step that is repeatedly performed a plurality of times to dry an object to be dried af...

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Bibliographic Details
Main Author TANAKA, Tatsumi
Format Patent
LanguageEnglish
Published 02.11.2023
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Summary:A drying method includes an initial decompressing and temperature-lowering step of decompressing the chamber and lowering an air temperature inside the chamber by operating a decompression pump; and a drying cycle step that is repeatedly performed a plurality of times to dry an object to be dried after performing the initial decompressing and temperature-lowering step. The drying cycle step includes a microwave heating step of heating the object in the chamber by microwave irradiation in the chamber and a decompressing and temperature-lowering step of decompressing the chamber and lowering the air temperature inside the chamber again after performing the microwave heating step by operating the decompression pump with the microwave irradiation being stopped.
Bibliography:Application Number: US202118020717