MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS

• Main Authors: INOUE, Seiya, KUNO, Tatsuya, NAGAE, Tomoki, YOTO, Takuya, OGISO, Yusuke
• Format: Patent
• Language: English
• Published: 21.09.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A member for semiconductor manufacturing apparatus includes: a ceramic plate having a wafer placement surface on its upper surface; and a porous plug that is disposed in a plug insertion hole penetrating the ceramic plate in a up-down direction, and allows a gas to flow, wherein the porous plug has...