SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
A semiconductor device includes a substrate including cell and core regions respectively having first and second active patterns having respective, opposing sidewall surfaces at least partially defining a trench therebetween, and a boundary region between the cell and core regions, a device isolatio...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
13.07.2023
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Online Access | Get full text |
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