LIFT PIN ASSEMBLY AND SUBSTRATE PROCESSING APPARATUS HAVING SAME

• Main Authors: LIM, Do Youn, CHOI, Jun Hyeak, JEONG, Wan Hee, KIM, Kuk Saeng
• Format: Patent
• Language: English
• Published: 29.06.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A substrate support unit includes a substrate support member that supports a substrate, the substrate support member being provided with one or more pin holes vertically penetrating the substrate support member, and a lift pin assembly provided to be lifted along a corresponding pin hole. The lift p...