DISPLAY APPARATUS AND METHOD OF MANUFACTURING THE SAME
Provided are a display apparatus, which may be easily separated from a carrier substrate, and a method of manufacturing the same. The method of manufacturing a display apparatus includes: forming, on a carrier substrate, a first inorganic layer including silicon oxide; plasma-treating the first inor...
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Main Authors | , , , , |
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Format | Patent |
Language | English |
Published |
01.06.2023
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Subjects | |
Online Access | Get full text |
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Summary: | Provided are a display apparatus, which may be easily separated from a carrier substrate, and a method of manufacturing the same. The method of manufacturing a display apparatus includes: forming, on a carrier substrate, a first inorganic layer including silicon oxide; plasma-treating the first inorganic layer by using nitrous oxide gas; after the plasma-treating, forming a display substrate on the first inorganic layer; forming a display element layer above the display substrate; and separating the display substrate from the carrier substrate. |
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Bibliography: | Application Number: US202217939360 |