HETEROGENEOUS INTEGRATION DETECTING METHOD AND HETEROGENEOUS INTEGRATION DETECTING APPARATUS
A heterogeneous integration detecting method and a heterogeneous integration detecting apparatus are provided. The heterogeneous integration detecting method includes the following. Under the condition of maintaining the same relative distance between an interference objective lens and a sample, the...
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Format | Patent |
Language | English |
Published |
18.05.2023
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Abstract | A heterogeneous integration detecting method and a heterogeneous integration detecting apparatus are provided. The heterogeneous integration detecting method includes the following. Under the condition of maintaining the same relative distance between an interference objective lens and a sample, the relative posture of the interference objective lens and the sample is continuously adjusted according to the change of an image of the sample in the field of view of the interference objective lens until a first optical axis of the interference objective lens is determined to be substantially perpendicular to the surface of the sample according to the image. The interference objective lens is replaced with an imaging objective lens and the geometric profile of at least one via of the sample is detected. A second optical axis of the imaging objective lens after replacement overlaps with the first optical axis of the interference objective lens before replacement. |
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AbstractList | A heterogeneous integration detecting method and a heterogeneous integration detecting apparatus are provided. The heterogeneous integration detecting method includes the following. Under the condition of maintaining the same relative distance between an interference objective lens and a sample, the relative posture of the interference objective lens and the sample is continuously adjusted according to the change of an image of the sample in the field of view of the interference objective lens until a first optical axis of the interference objective lens is determined to be substantially perpendicular to the surface of the sample according to the image. The interference objective lens is replaced with an imaging objective lens and the geometric profile of at least one via of the sample is detected. A second optical axis of the imaging objective lens after replacement overlaps with the first optical axis of the interference objective lens before replacement. |
Author | Wei, Hsiang-Chun Liu, Chih-Hsiang Lo, Chun-Wei Kuo, Chung-Lun Lo, Chieh-Yi Ku, Yi-Sha |
Author_xml | – fullname: Lo, Chieh-Yi – fullname: Lo, Chun-Wei – fullname: Wei, Hsiang-Chun – fullname: Ku, Yi-Sha – fullname: Kuo, Chung-Lun – fullname: Liu, Chih-Hsiang |
BookMark | eNrjYmDJy89L5WSI8XANcQ3yd3f1c_UPDVbw9AtxdQ9yDPH091NwAco4h3j6uSv4uoZ4-LsoOPq5KBCj3DEgwBEoGBrMw8CalphTnMoLpbkZlN1cQ5w9dFML8uNTiwsSk1PzUkviQ4ONDIyMDU2NDCzMHA2NiVMFACVxNaQ |
ContentType | Patent |
DBID | EVB |
DatabaseName | esp@cenet |
DatabaseTitleList | |
Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Medicine Chemistry Sciences Physics |
ExternalDocumentID | US2023152086A1 |
GroupedDBID | EVB |
ID | FETCH-epo_espacenet_US2023152086A13 |
IEDL.DBID | EVB |
IngestDate | Fri Jul 19 12:50:58 EDT 2024 |
IsOpenAccess | true |
IsPeerReviewed | false |
IsScholarly | false |
Language | English |
LinkModel | DirectLink |
MergedId | FETCHMERGED-epo_espacenet_US2023152086A13 |
Notes | Application Number: US202117562019 |
OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230518&DB=EPODOC&CC=US&NR=2023152086A1 |
ParticipantIDs | epo_espacenet_US2023152086A1 |
PublicationCentury | 2000 |
PublicationDate | 20230518 |
PublicationDateYYYYMMDD | 2023-05-18 |
PublicationDate_xml | – month: 05 year: 2023 text: 20230518 day: 18 |
PublicationDecade | 2020 |
PublicationYear | 2023 |
RelatedCompanies | Industrial Technology Research Institute |
RelatedCompanies_xml | – name: Industrial Technology Research Institute |
Score | 3.4625118 |
Snippet | A heterogeneous integration detecting method and a heterogeneous integration detecting apparatus are provided. The heterogeneous integration detecting method... |
SourceID | epo |
SourceType | Open Access Repository |
SubjectTerms | MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING |
Title | HETEROGENEOUS INTEGRATION DETECTING METHOD AND HETEROGENEOUS INTEGRATION DETECTING APPARATUS |
URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230518&DB=EPODOC&locale=&CC=US&NR=2023152086A1 |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwjR1dS8Mw8Bjz802nMnVKQelb0a3pRx6GdE23KqwttpU9CKMtKQjSDVvx73uJm-5p-Ji7cCQHl_u-ANzSwuKcDyyNmpmtkb5VanY2MDST5pSSvES8iENOA9NPydPMmLXgfd0LI-eEfsnhiChRBcp7I9_r5V8Qi8nayvouf0PQ4mGcDJm68o7RnjZQnNlo6EUhC13VdYdprAbPEoeqCg14B32lHWFIi0n73stI9KUsN5XK-Ah2I6RXNcfQ4lUHDtz132sd2J-uUt4d2JM1mkWNwJUc1ifw6ntohoai7ixMY0XMtZ38RJsUhhg3eQwmytRL_JApTsCU_2x3oshBYBqfws3YS1xfwwPPf_kzT-PN2-ln0K4WFe-Ccp_RkvYLwk3TJrpd5DkpLZ0KJ4tTkpFz6G2jdLEdfQmHYilS6X27B-3m45NfoYZu8mvJ2G-DD4xL |
link.rule.ids | 230,309,786,891,25594,76906 |
linkProvider | European Patent Office |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwjV1LS8NAEB5KfdSbVsVH1YDSW9C22yR7KJJm06baPDCJ9FAoSdiAIGmxEf--s2urPRWv8y3L7sDsvGcB7mimc87bukq1xFBJS89VI2l3VY2mlJI0R1zEIV1Pc2LyNOlOKvC-7oWRc0K_5HBElKgM5b2U7_XiL4jFZG3l8j59Q9L8cRD1WHPlHaM93UVxZv2eHfjMt5qW1YvDpvciMVRVaMCb6Cvt6GI-rzCeXvuiL2WxqVQGh7Ab4H5FeQQVXtShZq3_XqvDvrtKeddhT9ZoZkskruRweQxTx0Yz1Bd1Z34cKmKu7fAn2qQwRKxo5A0V144cnymmx5T_LDeDwERiHJ7A7cCOLEfFA89--TOLw83bdU6hWswLfgbKQ0Jz2soI1zSDdIwsTUmud6hwsjglCTmHxradLrbDN1BzInc8G4-850s4EJBIq7eMBlTLj09-hdq6TK8lk78BO-CPOA |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=HETEROGENEOUS+INTEGRATION+DETECTING+METHOD+AND+HETEROGENEOUS+INTEGRATION+DETECTING+APPARATUS&rft.inventor=Lo%2C+Chieh-Yi&rft.inventor=Lo%2C+Chun-Wei&rft.inventor=Wei%2C+Hsiang-Chun&rft.inventor=Ku%2C+Yi-Sha&rft.inventor=Kuo%2C+Chung-Lun&rft.inventor=Liu%2C+Chih-Hsiang&rft.date=2023-05-18&rft.externalDBID=A1&rft.externalDocID=US2023152086A1 |