INDUCTIVELY COUPLED PLASMA REACTOR AND WIRE STRUCTURE FOR ANTENNA COIL OF INDUCTIVELY COUPLED PLASMA REACTOR
According to the present invention, provided is an inductively coupled plasma reactor including: a reaction chamber configured to provide a plasma reaction space; a ferrite core arranged to surround the plasma reaction space; and an antenna coil formed by winding a strip-shaped wire structure on the...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
04.05.2023
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Subjects | |
Online Access | Get full text |
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