PURGE FLOW DISTRIBUTION SYSTEM FOR A SUBSTRATE CONTAINER AND METHOD FOR PERFORMING THE SAME
A substrate container includes a shell defining an interior space and a purge flow distribution system. The shell includes a front opening, a bottom wall, and a rear wall. The purge flow distribution system receives a stream of purge gas and includes an inlet and a network of separate gas distributi...
Saved in:
Main Authors | , , , , , |
---|---|
Format | Patent |
Language | English |
Published |
27.04.2023
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Abstract | A substrate container includes a shell defining an interior space and a purge flow distribution system. The shell includes a front opening, a bottom wall, and a rear wall. The purge flow distribution system receives a stream of purge gas and includes an inlet and a network of separate gas distributing devices configured to distribute the stream of purge gas into the interior space. A supply line is also included that is connected to the inlet and configured to divide the supply of purge gas to the network of separate gas distributing devices. A method of purging an open substrate container includes supplying a stream of purge gas to an inlet of a purge flow distribution system and dividing the purge gas to supply a network of separate gas distributing devices to distribute the stream of purge gas into the interior space. |
---|---|
AbstractList | A substrate container includes a shell defining an interior space and a purge flow distribution system. The shell includes a front opening, a bottom wall, and a rear wall. The purge flow distribution system receives a stream of purge gas and includes an inlet and a network of separate gas distributing devices configured to distribute the stream of purge gas into the interior space. A supply line is also included that is connected to the inlet and configured to divide the supply of purge gas to the network of separate gas distributing devices. A method of purging an open substrate container includes supplying a stream of purge gas to an inlet of a purge flow distribution system and dividing the purge gas to supply a network of separate gas distributing devices to distribute the stream of purge gas into the interior space. |
Author | Wilkie, Thomas H Harr, Colton J Eggum, Shawn D Smith, Mark V Fuller, Matthew A Zabka, Michael C |
Author_xml | – fullname: Zabka, Michael C – fullname: Harr, Colton J – fullname: Eggum, Shawn D – fullname: Fuller, Matthew A – fullname: Wilkie, Thomas H – fullname: Smith, Mark V |
BookMark | eNqNiksKwjAUALPQhb87PHAtmLaC27R9bQMmKckLIi5KkbiStFDvj0U8gKuBmVmzRRxiWLF7622NUF3MFUrpyMrckzQa3M0RKqiMBQHO53MShFAYTUJqnK0uQSE1pvxOLdoZSuoaqEFwQuGWLZ_9awq7HzdsXyEVzSGMQxemsX-EGN6dd8kxSXly5qdM8PS_6wOxKjTP |
ContentType | Patent |
DBID | EVB |
DatabaseName | esp@cenet |
DatabaseTitleList | |
Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Medicine Chemistry Sciences |
ExternalDocumentID | US2023128154A1 |
GroupedDBID | EVB |
ID | FETCH-epo_espacenet_US2023128154A13 |
IEDL.DBID | EVB |
IngestDate | Fri Sep 20 10:14:19 EDT 2024 |
IsOpenAccess | true |
IsPeerReviewed | false |
IsScholarly | false |
Language | English |
LinkModel | DirectLink |
MergedId | FETCHMERGED-epo_espacenet_US2023128154A13 |
Notes | Application Number: US202217973309 |
OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230427&DB=EPODOC&CC=US&NR=2023128154A1 |
ParticipantIDs | epo_espacenet_US2023128154A1 |
PublicationCentury | 2000 |
PublicationDate | 20230427 |
PublicationDateYYYYMMDD | 2023-04-27 |
PublicationDate_xml | – month: 04 year: 2023 text: 20230427 day: 27 |
PublicationDecade | 2020 |
PublicationYear | 2023 |
RelatedCompanies | ENTEGRIS, INC |
RelatedCompanies_xml | – name: ENTEGRIS, INC |
Score | 3.4593694 |
Snippet | A substrate container includes a shell defining an interior space and a purge flow distribution system. The shell includes a front opening, a bottom wall, and... |
SourceID | epo |
SourceType | Open Access Repository |
SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
Title | PURGE FLOW DISTRIBUTION SYSTEM FOR A SUBSTRATE CONTAINER AND METHOD FOR PERFORMING THE SAME |
URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230427&DB=EPODOC&locale=&CC=US&NR=2023128154A1 |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1bS8MwFA5jivqmU_EyJaD0bTjr2piHIW2TrhV7oUl14sMwWwuCdMNV_PsmodM97SnJSQi5cJJ85yRfALiWEMCykVn0SoElQMFyLvDs3uqVuH-HFGVVw_YZ20E-eBxb4xb4XL2F0TyhP5ocUWrUVOp7rdfrxb8Ri-i7lcsb8SFF8wefD4nRoGNl4TSRQdwhTROSeIbnDXNmxJnOU04ja-BIrLSlDtKKaZ8-u-pdymJ9U_H3wXYq66vqA9Aqqg7Y9VZ_r3XATtS4vGW00b7lIXhL82xEof-UvEASMp6Fbq4sTJC9Mk4jKAEddCDLXfURMqfQS2LuhDGV0pjAiPIgIbpQSjMZRGE8gjygkDkRPQJXPuVe0JOtnPwNyiRn6126Owbtal4VJwDemqic4X6JSmEPZkJgGwtk43fbEtOphfunoLupprPN2edgTyWVP8VEXdCuv76LC7kt1-JSj-YvuX2Hyg |
link.rule.ids | 230,309,786,891,25594,76906 |
linkProvider | European Patent Office |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1bS8MwFD6MKeqbTsXL1IDSt-Hs1sY8DOklXavrhTbViQ_DbC0I0g1X8e-blE73tKeEnBByEk6S75zkC8CNgACajtWsk3MiAAoRc0Fm91onJ90elpRVNdtnoLtp_3GsjRvwuXoLU_GE_lTkiMKipsLey2q9Xvw7sezqbuXyln-IovmDwwa2UqNj6eFUsWKbAxqFdmgpljVIEyWIK5kMGml9Q2ClLSz5eeXh6dmU71IW65uKsw_bkWivKA-gkRUt2LVWf6-1YMevQ94iW1vf8hDeojQeUuSMwhdkewmLPTOVHiaUvCaM-kgAOmSgJDXlR8iMIisMmOEFVJQGNvIpc0O7qhTRWCS-FwwRcylKDJ8ewbVDmeV2RC8nf4MySZN1lXrH0CzmRXYC6E7F-Yx0c5xzvT_jnOiEC3XfdY1PpxrpnkJ7U0tnm8VXsOsyfzQZecHTOexJkYytqLgNzfLrO7sQW3TJL6uR_QU8LYq3 |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=PURGE+FLOW+DISTRIBUTION+SYSTEM+FOR+A+SUBSTRATE+CONTAINER+AND+METHOD+FOR+PERFORMING+THE+SAME&rft.inventor=Zabka%2C+Michael+C&rft.inventor=Harr%2C+Colton+J&rft.inventor=Eggum%2C+Shawn+D&rft.inventor=Fuller%2C+Matthew+A&rft.inventor=Wilkie%2C+Thomas+H&rft.inventor=Smith%2C+Mark+V&rft.date=2023-04-27&rft.externalDBID=A1&rft.externalDocID=US2023128154A1 |