OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS
An optical system comprises at least one mirror having a mirror body and a mirror surface, and at least one actuator device coupled to the mirror body and serving for deforming the mirror surface. The actuator device comprises at least one electrostrictive actuator element for generating a mechanica...
Saved in:
Main Authors | , |
---|---|
Format | Patent |
Language | English |
Published |
01.12.2022
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Abstract | An optical system comprises at least one mirror having a mirror body and a mirror surface, and at least one actuator device coupled to the mirror body and serving for deforming the mirror surface. The actuator device comprises at least one electrostrictive actuator element for generating a mechanical stress in the mirror body for deforming the mirror surface depending on an electrical drive voltage, and at least one electrostrictive sensor element for outputting a sensor signal depending on a deformation of the sensor element. The at least one sensor element is arranged directly adjacent to the actuator element and/or is arranged in such a way that it is configured at least partly for transferring the mechanical stress generated by the actuator element to the mirror body. |
---|---|
AbstractList | An optical system comprises at least one mirror having a mirror body and a mirror surface, and at least one actuator device coupled to the mirror body and serving for deforming the mirror surface. The actuator device comprises at least one electrostrictive actuator element for generating a mechanical stress in the mirror body for deforming the mirror surface depending on an electrical drive voltage, and at least one electrostrictive sensor element for outputting a sensor signal depending on a deformation of the sensor element. The at least one sensor element is arranged directly adjacent to the actuator element and/or is arranged in such a way that it is configured at least partly for transferring the mechanical stress generated by the actuator element to the mirror body. |
Author | Manger, Matthias Raab, Markus |
Author_xml | – fullname: Raab, Markus – fullname: Manger, Matthias |
BookMark | eNrjYmDJy89L5WTQ8A8I8XR29FEIjgwOcfVVcPRzUfDxDPHwdw9yDPCIVHAMCHAMcgwJDeZhYE1LzClO5YXS3AzKbq4hzh66qQX58anFBYnJqXmpJfGhwUYGRkbGFkaGZmaOhsbEqQIAoegnAQ |
ContentType | Patent |
DBID | EVB |
DatabaseName | esp@cenet |
DatabaseTitleList | |
Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Medicine Chemistry Sciences Physics |
ExternalDocumentID | US2022382166A1 |
GroupedDBID | EVB |
ID | FETCH-epo_espacenet_US2022382166A13 |
IEDL.DBID | EVB |
IngestDate | Fri Jul 19 12:57:26 EDT 2024 |
IsOpenAccess | true |
IsPeerReviewed | false |
IsScholarly | false |
Language | English |
LinkModel | DirectLink |
MergedId | FETCHMERGED-epo_espacenet_US2022382166A13 |
Notes | Application Number: US202217885353 |
OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20221201&DB=EPODOC&CC=US&NR=2022382166A1 |
ParticipantIDs | epo_espacenet_US2022382166A1 |
PublicationCentury | 2000 |
PublicationDate | 20221201 |
PublicationDateYYYYMMDD | 2022-12-01 |
PublicationDate_xml | – month: 12 year: 2022 text: 20221201 day: 01 |
PublicationDecade | 2020 |
PublicationYear | 2022 |
RelatedCompanies | Carl Zeiss SMT GmbH |
RelatedCompanies_xml | – name: Carl Zeiss SMT GmbH |
Score | 3.4427826 |
Snippet | An optical system comprises at least one mirror having a mirror body and a mirror surface, and at least one actuator device coupled to the mirror body and... |
SourceID | epo |
SourceType | Open Access Repository |
SubjectTerms | APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS |
Title | OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS |
URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20221201&DB=EPODOC&locale=&CC=US&NR=2022382166A1 |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1ZS8NAEB5KPd80Kh5VAkrwpZg7eSmyzWEUmyxNIu1TabJbECQtNuLfd7K22qc-7izMHuwc3-7MLMCdqpbc4I7TnZkMAYqFx9g1uNU1XeZqU1PTuN3kDg9iO8rNl5E1asHHOhdG1An9FsURUaJKlPda6OvF_yWWL2Irlw_FO5Lmj2HW85UVOtZRESM29vu9gCZ-4ime18tTJR6KPsPVNdsmiJV2Gke6qbQfvPWbvJTFplEJj2CXIr-qPoYWryQ48NZ_r0mwP1g9eUuwJ2I0yyUSV3K4PIH7hGZNIQM5HadZMJBJ7Muvz1mUPA0JjcYyoZQMSZanp3AbBpkXdXHwyd9aJ3m6OVPjDNrVvOLnIOt2WTJmTlWHM3QirGLG9UJjztRh5kxXjQvobON0ub37Cg6b5m-cRgfa9ecXv0ZrWxc3YpN-AHe1fgw |
link.rule.ids | 230,309,786,891,25594,76903 |
linkProvider | European Patent Office |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1LT8JAEJ4QfOBNUYOK2kTTeCH23V6IKS1YtK_QrYETod0lMTGFSI1_3-kKyonrTDL7yDz2252ZBbiXpJypzDQ7c40iQNFRjS2V6R3NopY802SZGVXtcBAaXqq9jPVxDT42tTC8T-g3b46IFpWjvZfcXy__L7Fcnlu5eszekbR4GpCuK67RsYKOGLGx2-v248iNHNFxumkihiPOUy1FNgwbsdKeiaCQg6W3XlWXstwOKoNj2I9RXlGeQI0VTWg4m7_XmnAYrJ-8m3DAczTzFRLXdrg6hYcoJlUjAyGZJKQfCHboCv6QeNHzyI69iWDHsT2ySZqcwd2gTxyvg4NP_9Y6TZPtmarnUC8WBWuBoBh5Tqk2k0xG8RChZ3OmZDI1ZybV5oqkXkB7l6TL3exbaHgk8Kf-MHy9gqOK9Zuz0YZ6-fnFrjHyltkN37AfgcOA9g |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=OPTICAL+SYSTEM+AND+LITHOGRAPHY+APPARATUS&rft.inventor=Raab%2C+Markus&rft.inventor=Manger%2C+Matthias&rft.date=2022-12-01&rft.externalDBID=A1&rft.externalDocID=US2022382166A1 |