WAVEGUIDE HEATER
An optical waveguide structure. In some embodiments, the optical waveguide structure includes a semiconductor waveguide having a waveguide ridge, and a heater. The waveguide ridge may have a varying dopant concentration across its cross-section. The heater may include a first contact and a second co...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
22.09.2022
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Subjects | |
Online Access | Get full text |
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