INTERFACE TOOL
A closed gas circulation system may include a sealed plenum, circulation fans, and a fan filter unit (FFU) inlet to contain, filter, condition, and re-circulate a gas through a chamber of an interface tool. The gas provided to the chamber is maintained in a conditioned environment in the closed gas...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
08.09.2022
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Subjects | |
Online Access | Get full text |
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