TEST APPARATUS, TEST METHOD AND RECORDING MEDIUM

Provided is a technique capable of improving test efficiency of semiconductor devices. A test apparatus includes a probe card having a plurality of measurement sites that contact with a plurality of semiconductor devices formed on a semiconductor wafer; a control unit configured to generate map info...

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Bibliographic Details
Main Author SAKAGUCHI, Kazuhiro
Format Patent
LanguageEnglish
Published 25.08.2022
Subjects
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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