ION IMPLANTER AND ION IMPLANTATION METHOD

An ion implanter includes a beam generation device that generates an ion beam with which a workpiece is irradiated, a control device that sets a plurality of operation parameters for controlling an operation of the beam generation device, a measurement device that measures at least one of beam chara...

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Bibliographic Details
Main Authors KUDO, Tetsuya, YAMAGUCHI, Mikio, ISHIBASHI, Kazuhisa
Format Patent
LanguageEnglish
Published 11.08.2022
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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