HIGH-BRIGHTNESS LASER PRODUCED PLASMA SOURCE AND METHOD OF GENERATION AND COLLECTION RADIATION
A laser produced plasma light source comprises a vacuum chamber with a rotating target assembly supplying a target into an interaction zone with focused laser beam. The target is layer of a fluid and/or free-flowing target material on a surface of annular groove in the rotating target assembly. An o...
Saved in:
Main Authors | , , , , , , , , , |
---|---|
Format | Patent |
Language | English |
Published |
28.04.2022
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Abstract | A laser produced plasma light source comprises a vacuum chamber with a rotating target assembly supplying a target into an interaction zone with focused laser beam. The target is layer of a fluid and/or free-flowing target material on a surface of annular groove in the rotating target assembly. An output beam of short-wavelength radiation exits the interaction zone to an optical collector through the means for debris mitigation. A linear velocity of the target is not less than 100 m/s and a vector of the linear velocity of the target in the interaction zone is directed on one side of a plane passing through the interaction zone and the rotation axis while the focused laser beam and the output beam are located on another side of said plane. The optical collector comprises two ellipsoidal mirror units arranged in a tandem. |
---|---|
AbstractList | A laser produced plasma light source comprises a vacuum chamber with a rotating target assembly supplying a target into an interaction zone with focused laser beam. The target is layer of a fluid and/or free-flowing target material on a surface of annular groove in the rotating target assembly. An output beam of short-wavelength radiation exits the interaction zone to an optical collector through the means for debris mitigation. A linear velocity of the target is not less than 100 m/s and a vector of the linear velocity of the target in the interaction zone is directed on one side of a plane passing through the interaction zone and the rotation axis while the focused laser beam and the output beam are located on another side of said plane. The optical collector comprises two ellipsoidal mirror units arranged in a tandem. |
Author | KRIVOKORYTOV, Mikhail Sergeyevich MEDVEDEV, Vyacheslav Valerievich ELLWI, Samir GLUSHKOV, Denis Aleksandrovich VINOKHODOV, Aleksandr Yurievich IVANOV, Vladimir Vitalievich KRIVTSUN, Vladimir Mikhailovich LASH, Aleksandr Andreevich KHRISTOFOROV, Oleg Borisovich KOSHELEV, Konstantin Nikolaevich |
Author_xml | – fullname: GLUSHKOV, Denis Aleksandrovich – fullname: KHRISTOFOROV, Oleg Borisovich – fullname: MEDVEDEV, Vyacheslav Valerievich – fullname: IVANOV, Vladimir Vitalievich – fullname: VINOKHODOV, Aleksandr Yurievich – fullname: LASH, Aleksandr Andreevich – fullname: KRIVOKORYTOV, Mikhail Sergeyevich – fullname: ELLWI, Samir – fullname: KOSHELEV, Konstantin Nikolaevich – fullname: KRIVTSUN, Vladimir Mikhailovich |
BookMark | eNqNissKgzAUBbNoF339w4WuhRqlXafJ1QgxkTy2FSnpqqhg_59K6Ad0c4Zhzp5sxmmMO_KQTS2zu13Xa3QOFHNoobNGBI4CutVbBs4EyxGYFtCil0aAqaBGjZb5xugUuFEKeVLLRJPCkWxfw3uJpx8P5Fyh5zKL89THZR6ecYyfPjh6oTQv6LW8sbz47_UFICE1Yg |
ContentType | Patent |
DBID | EVB |
DatabaseName | esp@cenet |
DatabaseTitleList | |
Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Medicine Chemistry Sciences Physics |
ExternalDocumentID | US2022132647A1 |
GroupedDBID | EVB |
ID | FETCH-epo_espacenet_US2022132647A13 |
IEDL.DBID | EVB |
IngestDate | Fri Jul 19 12:46:17 EDT 2024 |
IsOpenAccess | true |
IsPeerReviewed | false |
IsScholarly | false |
Language | English |
LinkModel | DirectLink |
MergedId | FETCHMERGED-epo_espacenet_US2022132647A13 |
Notes | Application Number: US202217569737 |
OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220428&DB=EPODOC&CC=US&NR=2022132647A1 |
ParticipantIDs | epo_espacenet_US2022132647A1 |
PublicationCentury | 2000 |
PublicationDate | 20220428 |
PublicationDateYYYYMMDD | 2022-04-28 |
PublicationDate_xml | – month: 04 year: 2022 text: 20220428 day: 28 |
PublicationDecade | 2020 |
PublicationYear | 2022 |
RelatedCompanies | RnD-ISAN, Ltd Isteq B.V |
RelatedCompanies_xml | – name: Isteq B.V – name: RnD-ISAN, Ltd |
Score | 3.4011562 |
Snippet | A laser produced plasma light source comprises a vacuum chamber with a rotating target assembly supplying a target into an interaction zone with focused laser... |
SourceID | epo |
SourceType | Open Access Repository |
SubjectTerms | APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS X-RAY TECHNIQUE |
Title | HIGH-BRIGHTNESS LASER PRODUCED PLASMA SOURCE AND METHOD OF GENERATION AND COLLECTION RADIATION |
URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220428&DB=EPODOC&locale=&CC=US&NR=2022132647A1 |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfR3LSgMxcCj1edOq-KgSUPa22O67hyLbJOtWut1lH9KTZZ8gyLbYFX_fJLbaUy-BZCAkw0xmJvMCeDAHFlN0GfFqmlrKmpWr8iDLNVnRGDH3i6qXpdyj600NN9FeZvqsBR-bXBhRJ_RbFEdkHJUzfm_Ee738_8QiIrZy9Zi9s6XFkxMPibS2jhWFmwASGQ1p4BMfSxgPk0iahgLGDC9DM21mK-1xRZpX2qevI56XstwWKs4J7Adsv7o5hVZZd-AIb3qvdeDQW7u8O3AgYjTzFVtc8-HqDN7c8bMrj0I2xrxrBprYEQ1REPokwZSggM09G0V-EmKK7ClBHo1dnyDfQb_BavxnSgCwP5lQEUmCQpuMBeAc7h0aY1dmR57_YWieRNv3Uy-gXS_q8hJQqpuqbmRmrzIYt_YrK7WK3FCqSk37mVLoV9DdtdP1bvANHPMpd64oVhfazedXectkdJPdCdT-AKPYi5c |
link.rule.ids | 230,309,786,891,25594,76903 |
linkProvider | European Patent Office |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1bS8MwFD6MeZlvOhUvUwNK34pb73sY0jWtnfZGL7InR9u1IEg3XMW_72nc1Ke9BJIPDskhJ8mXc5IDcKcONTzo4uSVJLHgJS0X-WGWS7wg4WQezMt-ljYeXddT7ER6msrTFrxv3sKwf0K_2OeIaFE52nvN1uvl3yUWZbGVq_vsDZsWD1Y8otyaHQtCQwE4Oh6ZgU99gzOMURJxXsgwJF6KpOrIlXZUJIWMLL2Mm3cpy_-binUIuwHKq-ojaBVVFzrGJvdaF_bdtcu7C3ssRjNfYePaDlfH8GpPHm1-HGIZN1kziKNHZkiC0KeJYVISYN3VSeQnoWES3aPENWPbp8S3yE-wWnMzxQDDdxyTRZKQUKcTBpzArWXGhs1jl2e_Gpol0f_xiafQrhZVcQYklVVRVjK1XyporYNSS7V5rghlKaaDTJjL59DbJuliO3wDHTt2nZkz8Z4v4aCBGkeLoPWgXX98Fle4X9fZNVPzN1ABjoE |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=HIGH-BRIGHTNESS+LASER+PRODUCED+PLASMA+SOURCE+AND+METHOD+OF+GENERATION+AND+COLLECTION+RADIATION&rft.inventor=GLUSHKOV%2C+Denis+Aleksandrovich&rft.inventor=KHRISTOFOROV%2C+Oleg+Borisovich&rft.inventor=MEDVEDEV%2C+Vyacheslav+Valerievich&rft.inventor=IVANOV%2C+Vladimir+Vitalievich&rft.inventor=VINOKHODOV%2C+Aleksandr+Yurievich&rft.inventor=LASH%2C+Aleksandr+Andreevich&rft.inventor=KRIVOKORYTOV%2C+Mikhail+Sergeyevich&rft.inventor=ELLWI%2C+Samir&rft.inventor=KOSHELEV%2C+Konstantin+Nikolaevich&rft.inventor=KRIVTSUN%2C+Vladimir+Mikhailovich&rft.date=2022-04-28&rft.externalDBID=A1&rft.externalDocID=US2022132647A1 |