LOW RESISTANCE APPROACHES FOR FABRICATING CONTACTS AND THE RESULTING STRUCTURES
Low resistance approaches for fabricating contacts, and semiconductor structures having low resistance metal contacts, are described. In an example, an integrated circuit structure includes a semiconductor structure above a substrate. A gate electrode is over the semiconductor structure, the gate el...
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Main Authors | , , , , , , , , , , , |
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Format | Patent |
Language | English |
Published |
31.03.2022
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Subjects | |
Online Access | Get full text |
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Abstract | Low resistance approaches for fabricating contacts, and semiconductor structures having low resistance metal contacts, are described. In an example, an integrated circuit structure includes a semiconductor structure above a substrate. A gate electrode is over the semiconductor structure, the gate electrode defining a channel region in the semiconductor structure. A first semiconductor source or drain structure is at a first end of the channel region at a first side of the gate electrode. A second semiconductor source or drain structure is at a second end of the channel region at a second side of the gate electrode, the second end opposite the first end. A source or drain contact is directly on the first or second semiconductor source or drain structure, the source or drain contact including a barrier layer and an inner conductive structure. |
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AbstractList | Low resistance approaches for fabricating contacts, and semiconductor structures having low resistance metal contacts, are described. In an example, an integrated circuit structure includes a semiconductor structure above a substrate. A gate electrode is over the semiconductor structure, the gate electrode defining a channel region in the semiconductor structure. A first semiconductor source or drain structure is at a first end of the channel region at a first side of the gate electrode. A second semiconductor source or drain structure is at a second end of the channel region at a second side of the gate electrode, the second end opposite the first end. A source or drain contact is directly on the first or second semiconductor source or drain structure, the source or drain contact including a barrier layer and an inner conductive structure. |
Author | HARATIPOUR, Nazila METZ, Matthew V MURTHY, Anand S DEWEY, Gilbert LU, Mengcheng KEECH, Ryan KAVALIEROS, Jack T JHA, Jitendra Kumar GLASS, Glenn A CHOUKSEY, Siddharth GANGULY, Koustav SEN GUPTA, Arnab |
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Snippet | Low resistance approaches for fabricating contacts, and semiconductor structures having low resistance metal contacts, are described. In an example, an... |
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SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
Title | LOW RESISTANCE APPROACHES FOR FABRICATING CONTACTS AND THE RESULTING STRUCTURES |
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