METHOD FOR FABRICATING MEMORY DEVICE

• Main Authors: Liao, Ting-Feng, Chiu, Yuan-Chieh, Liu, Kuang-Wen, Chung, Yao-An, Chen, Kuang-Chao
• Format: Patent
• Language: English
• Published: 10.03.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A method for fabricating a memory device includes: providing a substrate; forming a first dielectric layer over the substrate; forming a plurality of conductive layers and a plurality of dielectric layers alternately and horizontally disposed on the substrate; forming a channel column structure on t...