PHASE CHANGE MICRO SHUTTER ARRAY GRID AND METHOD
A microelectromechanical system (MEMS) actuator device includes a substrate; a shape memory alloy over the substrate; and a reflective coating on the shape memory alloy. The shape memory alloy and the reflective coating form a bi-layer cantilever beam having a first end anchored to the substrate, an...
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Format | Patent |
Language | English |
Published |
24.02.2022
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Abstract | A microelectromechanical system (MEMS) actuator device includes a substrate; a shape memory alloy over the substrate; and a reflective coating on the shape memory alloy. The shape memory alloy and the reflective coating form a bi-layer cantilever beam having a first end anchored to the substrate, and a second end released from the substrate. The second end of the cantilever beam articulates between a deflection configuration away from the substrate and a non-deflection configuration towards the substrate based on a thermal phase change in the shape memory alloy. |
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AbstractList | A microelectromechanical system (MEMS) actuator device includes a substrate; a shape memory alloy over the substrate; and a reflective coating on the shape memory alloy. The shape memory alloy and the reflective coating form a bi-layer cantilever beam having a first end anchored to the substrate, and a second end released from the substrate. The second end of the cantilever beam articulates between a deflection configuration away from the substrate and a non-deflection configuration towards the substrate based on a thermal phase change in the shape memory alloy. |
Author | Morris, Christopher J Knick, Cory R Smith, Gabriel L |
Author_xml | – fullname: Morris, Christopher J – fullname: Smith, Gabriel L – fullname: Knick, Cory R |
BookMark | eNrjYmDJy89L5WQwCPBwDHZVcPZw9HN3VfD1dA7yVwj2CA0JcQ1ScAwKcoxUcA_ydFFw9HNR8HUN8fB34WFgTUvMKU7lhdLcDMpuriHOHrqpBfnxqcUFicmpeakl8aHBRgZGRgamphaWho6GxsSpAgCfZiim |
ContentType | Patent |
DBID | EVB |
DatabaseName | esp@cenet |
DatabaseTitleList | |
Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Medicine Chemistry Sciences |
ExternalDocumentID | US2022055891A1 |
GroupedDBID | EVB |
ID | FETCH-epo_espacenet_US2022055891A13 |
IEDL.DBID | EVB |
IngestDate | Fri Jul 19 12:58:12 EDT 2024 |
IsOpenAccess | true |
IsPeerReviewed | false |
IsScholarly | false |
Language | English |
LinkModel | DirectLink |
MergedId | FETCHMERGED-epo_espacenet_US2022055891A13 |
Notes | Application Number: US202016998458 |
OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220224&DB=EPODOC&CC=US&NR=2022055891A1 |
ParticipantIDs | epo_espacenet_US2022055891A1 |
PublicationCentury | 2000 |
PublicationDate | 20220224 |
PublicationDateYYYYMMDD | 2022-02-24 |
PublicationDate_xml | – month: 02 year: 2022 text: 20220224 day: 24 |
PublicationDecade | 2020 |
PublicationYear | 2022 |
RelatedCompanies | U.S. Army Combat Capabilities Development Command, Army Research Laboratory |
RelatedCompanies_xml | – name: U.S. Army Combat Capabilities Development Command, Army Research Laboratory |
Score | 3.3898232 |
Snippet | A microelectromechanical system (MEMS) actuator device includes a substrate; a shape memory alloy over the substrate; and a reflective coating on the shape... |
SourceID | epo |
SourceType | Open Access Repository |
SubjectTerms | MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS TRANSPORTING |
Title | PHASE CHANGE MICRO SHUTTER ARRAY GRID AND METHOD |
URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220224&DB=EPODOC&locale=&CC=US&NR=2022055891A1 |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfR1dS8Mw8BhT1Dedih9TAkrfirXLSvdQpGvaVaEf9EPm02i3FATphqv4973ETvc0CCHJQT6OXO4uyd0B3NOCGshVKpXrJVfpYqCpI16ZKm4VA8_kkhbSSVIQGn5OX6bDaQc-NrYw0k_ot3SOiBQ1R3pv5Hm9-r_EYvJv5fqhfMem5ZOXWUxptWNdJKqwseXGEYscxXGsPFXC5Bc2FCH0bNSV9oQgLTztu69jYZey2mYq3jHsx9hf3ZxAh9c9OHQ2sdd6cBC0T95YbKlvfQpa7NupSxzfDicuQfwlEUn9PEOJlNhJYr-RSfLMiB0yEriZH7EzuPPczPFVHHr2t9JZnm7Pc3AO3XpZ8wsgyEapjqKTMKSliMOiMueYVYVZjcqF9ngJ_V09Xe0GX8ORqEpLbdqHbvP5xW-Q1zblrUTRD7OMfSw |
link.rule.ids | 230,309,786,891,25594,76903 |
linkProvider | European Patent Office |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfR1dS8Mw8BhTnG86FadTA0rfinXLZvdQpGvaZbp-0A-ZT6PdWhCkG67i3_caO93TIISQg0ty5O5ySe4O4I7GtI9aJZPTTpLKdNFV5EGaqTJulT7K5ITGIkiS7fR5RJ-nvWkNPja-MCJO6LcIjogcNUd-L4S8Xv1fYjHxt3J9n7xj1_LJCjUmVdZxpyxUYkPN9FzmGpJhaFEgOf4vrFem0NPRVtp7RKNQGEuvw9IvZbWtVKwj2PcQX14cQy3Nm9AwNrnXmnBgV0_e2Ky4b30Cisf1wCQG152RSZB-vksCHoV4IiW67-tvZOSPGdEdRmwz5C47hVvLDA0u49Czv5XOomB7nt0zqOfLPD0HgmqUdvDoVDrSUqRhnKlzrLJYzQbJQnloQXsXpovd4Bto8NCezCZj5-USDkuQ8NqmbagXn1_pFerdIrkW5PoBsuqAFg |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=PHASE+CHANGE+MICRO+SHUTTER+ARRAY+GRID+AND+METHOD&rft.inventor=Morris%2C+Christopher+J&rft.inventor=Smith%2C+Gabriel+L&rft.inventor=Knick%2C+Cory+R&rft.date=2022-02-24&rft.externalDBID=A1&rft.externalDocID=US2022055891A1 |