PHASE CHANGE MICRO SHUTTER ARRAY GRID AND METHOD
A microelectromechanical system (MEMS) actuator device includes a substrate; a shape memory alloy over the substrate; and a reflective coating on the shape memory alloy. The shape memory alloy and the reflective coating form a bi-layer cantilever beam having a first end anchored to the substrate, an...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
24.02.2022
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Subjects | |
Online Access | Get full text |
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Summary: | A microelectromechanical system (MEMS) actuator device includes a substrate; a shape memory alloy over the substrate; and a reflective coating on the shape memory alloy. The shape memory alloy and the reflective coating form a bi-layer cantilever beam having a first end anchored to the substrate, and a second end released from the substrate. The second end of the cantilever beam articulates between a deflection configuration away from the substrate and a non-deflection configuration towards the substrate based on a thermal phase change in the shape memory alloy. |
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Bibliography: | Application Number: US202016998458 |