RECESSED PORTION IN A SUBSTRATE AND METHOD OF FORMING THE SAME

• Main Authors: CHUANG, Shao Hsuan, CHANG, Huang-Hsien
• Format: Patent
• Language: English
• Published: 10.02.2022
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

A recessed portion in a semiconductor substrate and a method of forming the same are provided. The method comprises: forming a mask on the semiconductor substrate; forming a protection layer on a top surface of the mask and on at least one sidewall of the mask, and on at least one surface of the sem...