PROCESS PROXIMITY CORRECTION METHOD AND THE COMPUTING DEVICE FOR THE SAME
A process proximity correction method is performed by a process proximity correction computing device which performs a process proximity correction (PPC) through at least one of a plurality of processors. The process proximity correction method includes: converting a target layout including a plural...
Saved in:
Main Authors | , , , , |
---|---|
Format | Patent |
Language | English |
Published |
03.02.2022
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | A process proximity correction method is performed by a process proximity correction computing device which performs a process proximity correction (PPC) through at least one of a plurality of processors. The process proximity correction method includes: converting a target layout including a plurality of patterns into an image, zooming-in or zooming-out the image at a plurality of magnifications to generate a plurality of input channels, receiving the plurality of input channels and performing machine learning to predict an after-cleaning image (ACI), comparing the predicted after-cleaning image with a target value to generate an after-cleaning image error, and adjusting the target layout on the basis of the after-cleaning image error. |
---|---|
Bibliography: | Application Number: US202117245947 |