Method and Apparatus for Poling Polymer Thin Films
A poling apparatus for poling a polymer thin film formed on a workpiece carried by a workpiece carrier. The workpiece has multiple grounding electrodes, grounding pads located at its edges, and a polymer thin film including multiple areas each covering only one grounding electrode. The poling appara...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
02.12.2021
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Subjects | |
Online Access | Get full text |
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