Method and Apparatus for Poling Polymer Thin Films

A poling apparatus for poling a polymer thin film formed on a workpiece carried by a workpiece carrier. The workpiece has multiple grounding electrodes, grounding pads located at its edges, and a polymer thin film including multiple areas each covering only one grounding electrode. The poling appara...

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Bibliographic Details
Main Authors Ting, Albert, Wang, Kai-An, Lu, Hongwei
Format Patent
LanguageEnglish
Published 02.12.2021
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