PHOTONIC INTEGRATED CIRCUIT PLATFORM AND OPTICAL PHASE ARRAY DEVICE USING THE SAME

• Main Authors: LEE, Changbum, LEE, Eunkyung, SHIM, Dongsik, JANG, Bongyong, SHIN, Dongjae
• Format: Patent
• Language: English
• Published: 25.11.2021
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

A photonic integrated circuit platform includes a substrate, a first oxide layer disposed on the substrate and including an insulating transparent oxide, and a first optical element layer disposed on the first oxide layer and including a semiconductor material. The photonic integrated circuit platfo...