POLISHING METHOD, POLISHING AGENT AND CLEANING AGENT FOR POLISHING
According to one embodiment, a polishing method includes supplying a polishing agent to be between a polishing pad and to-be-polished surface, then polishing the to-be-polished surface with the polishing agent while rotating at least one of the to-be-polished surface and the polishing pad. The polis...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
30.09.2021
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Subjects | |
Online Access | Get full text |
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