GRATING MEASURING MODULE AND MICRO-DISPLACEMENT MEASUREMENT DEVICE

• Main Authors: LAI, WENING, CHO, YU-AN, QIN, CHAO-YU
• Format: Patent
• Language: English
• Published: 16.09.2021
• Subjects: ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS; MEASURING; MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR; PHYSICS; TARIFF METERING APPARATUS; TESTING

A grating measuring module includes a light source, a collimating device, a first grating, a second grating, and an image sensing chip. The first grating is arranged on an optical path of the collimating device and the second grating is arranged on an optical path of the first grating. Each of the t...