Pedestal Heater for Spatial Multi-Wafer Processing Tool

Substrate supports comprising a top plate positioned on a shaft are described. The top plate including a primary heating element a first depth from the surface of the top plate, a inner zone heating element a second depth from the surface of the top plate and an outer zone heating element a third de...

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Bibliographic Details
Main Authors Baluja, Sanjeev, Ulavi, Tejas, Kashyap, Dhritiman Subha
Format Patent
LanguageEnglish
Published 15.04.2021
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Abstract Substrate supports comprising a top plate positioned on a shaft are described. The top plate including a primary heating element a first depth from the surface of the top plate, a inner zone heating element a second depth from the surface of the top plate and an outer zone heating element a third depth from the surface of the top plate. Substrate support assemblies comprising a plurality of substrate supports and methods of processing a substrate are also disclosed.
AbstractList Substrate supports comprising a top plate positioned on a shaft are described. The top plate including a primary heating element a first depth from the surface of the top plate, a inner zone heating element a second depth from the surface of the top plate and an outer zone heating element a third depth from the surface of the top plate. Substrate support assemblies comprising a plurality of substrate supports and methods of processing a substrate are also disclosed.
Author Kashyap, Dhritiman Subha
Baluja, Sanjeev
Ulavi, Tejas
Author_xml – fullname: Baluja, Sanjeev
– fullname: Ulavi, Tejas
– fullname: Kashyap, Dhritiman Subha
BookMark eNrjYmDJy89L5WQwD0hNSS0uScxR8EhNLEktUkjLL1IILkgsyQQK-ZbmlGTqhiemAcUDivKTU4uLM_PSFULy83N4GFjTEnOKU3mhNDeDsptriLOHbmpBfnxqcUFicmpeakl8aLCRgZEhEBiYWjgaGhOnCgBTUzAC
ContentType Patent
DBID EVB
DatabaseName esp@cenet
DatabaseTitleList
Database_xml – sequence: 1
  dbid: EVB
  name: esp@cenet
  url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP
  sourceTypes: Open Access Repository
DeliveryMethod fulltext_linktorsrc
Discipline Medicine
Chemistry
Sciences
ExternalDocumentID US2021111058A1
GroupedDBID EVB
ID FETCH-epo_espacenet_US2021111058A13
IEDL.DBID EVB
IngestDate Fri Jul 19 14:33:03 EDT 2024
IsOpenAccess true
IsPeerReviewed false
IsScholarly false
Language English
LinkModel DirectLink
MergedId FETCHMERGED-epo_espacenet_US2021111058A13
Notes Application Number: US202017066971
OpenAccessLink https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20210415&DB=EPODOC&CC=US&NR=2021111058A1
ParticipantIDs epo_espacenet_US2021111058A1
PublicationCentury 2000
PublicationDate 20210415
PublicationDateYYYYMMDD 2021-04-15
PublicationDate_xml – month: 04
  year: 2021
  text: 20210415
  day: 15
PublicationDecade 2020
PublicationYear 2021
RelatedCompanies Applied Materials, Inc
RelatedCompanies_xml – name: Applied Materials, Inc
Score 3.3242798
Snippet Substrate supports comprising a top plate positioned on a shaft are described. The top plate including a primary heating element a first depth from the surface...
SourceID epo
SourceType Open Access Repository
SubjectTerms BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Title Pedestal Heater for Spatial Multi-Wafer Processing Tool
URI https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20210415&DB=EPODOC&locale=&CC=US&NR=2021111058A1
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3dS8MwED_GFPVNp-LHlIDSt6Kz7do-FHH9oAjbimt1b6NNryCUdmwV_30vsdM9LU_5gCMJufvd5XIXgHvSaLmda1wldM5VnQ9QtS0ShsjTgrQLI_vNeDOeDMNEf50b8w6Um1gYmSf0WyZHJI7ixO-NlNfL_0ssT76tXD9kn9RVPwex4ymtdUz2C9FWvJHjR1Nv6iqu6yQzZfImx6g8GtYL2Up7pEibgh_895GIS1lug0pwDPsR0auaE-hg1YNDd_P3Wg8Oxq3Lm6ot961PwYwwJyGeliwkCYorRgonE38K0xliMpJW_UgL6m9f_xMqsbiuyzO4C_zYDVWaweJvwYtktj1d7Ry6VV3hBbBcNy1EfNK0IdctNFNbz7QiNczcsgVSX0J_F6Wr3cPXcCSawlcyMPrQbVZfeEOQ22S3cqd-AK5Lg5Y
link.rule.ids 230,309,783,888,25576,76876
linkProvider European Patent Office
linkToHtml http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3dT4MwEL8s0zjfdGr8mEqi4Y3oBAY8EOP4COpgxIHujUApiQmBZcP473utTPe0PjW95NI2vfvd9XpXgFu0aImRy0RCdM4lhQypZOioDClJC7Qu1Oy34o0fjLxYeZmr8w6U61wYXif0mxdHRIkiKO8N19eL_0ssm7-tXN1lnzhUP7qRaYutd4z-C_IW7bHphFN7aomWZcYzMXjjNGz3qv6EvtIOGtkakwfnfczyUhaboOIewG6I_KrmEDq06kPPWv-91oc9vw15Y7eVvtURaCHNUYmnpeChBqVLAQ1Ogf0pjGdI4Jm00kda4Hj7-h9RSYjqujyGG9eJLE_CGSR_C07i2eZ05RPoVnVFT0HIFU2nlD7I8ogoOtVSQ8nkIlW1XDcYUp_BYBun8-3ka-h5kT9JJs_B6wXsMxKLmwzVAXSb5Re9RPhtsiu-az8F0IaJ
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Pedestal+Heater+for+Spatial+Multi-Wafer+Processing+Tool&rft.inventor=Baluja%2C+Sanjeev&rft.inventor=Ulavi%2C+Tejas&rft.inventor=Kashyap%2C+Dhritiman+Subha&rft.date=2021-04-15&rft.externalDBID=A1&rft.externalDocID=US2021111058A1