SYSTEM FOR ELECTRICALLY DECOUPLED, HOMOGENEOUS TEMPERATURE CONTROL OF AN ELECTRODE BY MEANS OF HEAT CONDUCTION TUBES, AND PROCESSING FACILITY COMPRISING SUCH A SYSTEM

• Main Authors: BÖHM, Christian, RASCHKE, Sebastian
• Format: Patent
• Language: English
• Published: 25.03.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention relates to a system for temperature control of an electrode. The system comprises at least one heat pipe, a coupling element and a temperature control apparatus. In this case, the heat pipe is suitable for being arranged in the electrode at least in part and by means of at least one fi...