SYSTEM FOR ELECTRICALLY DECOUPLED, HOMOGENEOUS TEMPERATURE CONTROL OF AN ELECTRODE BY MEANS OF HEAT CONDUCTION TUBES, AND PROCESSING FACILITY COMPRISING SUCH A SYSTEM
The invention relates to a system for temperature control of an electrode. The system comprises at least one heat pipe, a coupling element and a temperature control apparatus. In this case, the heat pipe is suitable for being arranged in the electrode at least in part and by means of at least one fi...
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| Main Authors | , |
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| Format | Patent |
| Language | English |
| Published |
25.03.2021
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| Subjects | |
| Online Access | Get full text |
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| Abstract | The invention relates to a system for temperature control of an electrode. The system comprises at least one heat pipe, a coupling element and a temperature control apparatus. In this case, the heat pipe is suitable for being arranged in the electrode at least in part and by means of at least one first end. The coupling element is suitable for heating or cooling a second end of the heat pipe, while the temperature control apparatus is suitable for heating or cooling the coupling element. In this case, the electrode and the temperature control apparatus are galvanically separated from one another. The invention further relates to a treatment facility comprising a treatment chamber and at least one electrode inside the treatment chamber and at least one system of this kind for temperature control of an electrode. |
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| AbstractList | The invention relates to a system for temperature control of an electrode. The system comprises at least one heat pipe, a coupling element and a temperature control apparatus. In this case, the heat pipe is suitable for being arranged in the electrode at least in part and by means of at least one first end. The coupling element is suitable for heating or cooling a second end of the heat pipe, while the temperature control apparatus is suitable for heating or cooling the coupling element. In this case, the electrode and the temperature control apparatus are galvanically separated from one another. The invention further relates to a treatment facility comprising a treatment chamber and at least one electrode inside the treatment chamber and at least one system of this kind for temperature control of an electrode. |
| Author | BÖHM, Christian RASCHKE, Sebastian |
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| Notes | Application Number: US201816956387 |
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| PublicationYear | 2021 |
| RelatedCompanies | MEYER BURGER (GERMANY) GMBH |
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| Snippet | The invention relates to a system for temperature control of an electrode. The system comprises at least one heat pipe, a coupling element and a temperature... |
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| SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| Title | SYSTEM FOR ELECTRICALLY DECOUPLED, HOMOGENEOUS TEMPERATURE CONTROL OF AN ELECTRODE BY MEANS OF HEAT CONDUCTION TUBES, AND PROCESSING FACILITY COMPRISING SUCH A SYSTEM |
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