SEMICONDUCTOR STORAGE DEVICE
A semiconductor storage device includes a stacked body and a columnar body. The stacked body includes a plurality of conductive layers spaced apart from each other in a stacking direction. The columnar body penetrates the stacked body in the stacking direction. The columnar body includes a columnar...
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| Main Authors | , |
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| Format | Patent |
| Language | English |
| Published |
18.03.2021
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| Subjects | |
| Online Access | Get full text |
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| Abstract | A semiconductor storage device includes a stacked body and a columnar body. The stacked body includes a plurality of conductive layers spaced apart from each other in a stacking direction. The columnar body penetrates the stacked body in the stacking direction. The columnar body includes a columnar ferroelectric film, a semiconductor film disposed between the ferroelectric film and the conductive layers, and an insulating film disposed between the semiconductor film and the conductive layers. |
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| AbstractList | A semiconductor storage device includes a stacked body and a columnar body. The stacked body includes a plurality of conductive layers spaced apart from each other in a stacking direction. The columnar body penetrates the stacked body in the stacking direction. The columnar body includes a columnar ferroelectric film, a semiconductor film disposed between the ferroelectric film and the conductive layers, and an insulating film disposed between the semiconductor film and the conductive layers. |
| Author | TAKASHIMA, Daisaburo DOMAE, Sumiko |
| Author_xml | – fullname: TAKASHIMA, Daisaburo – fullname: DOMAE, Sumiko |
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| Notes | Application Number: US202017008236 |
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| PublicationYear | 2021 |
| RelatedCompanies | KIOXIA CORPORATION |
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| Snippet | A semiconductor storage device includes a stacked body and a columnar body. The stacked body includes a plurality of conductive layers spaced apart from each... |
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| SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INFORMATION STORAGE PHYSICS SEMICONDUCTOR DEVICES STATIC STORES |
| Title | SEMICONDUCTOR STORAGE DEVICE |
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