Level Sensor and Lithographic Apparatus
The invention provides a level sensor to measure a position of a surface of a substrate, comprising a projection unit arranged to direct a beam of radiation to the surface of the substrate and a detection unit. The detection unit comprises a detection grating arranged to receive the beam of radiatio...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
11.03.2021
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Subjects | |
Online Access | Get full text |
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