CHARGED PARTICLE BEAM APPARATUS

• Main Authors: Miwa, Takafumi, Nakamura, Yohei, Tsuno, Natsuki, Fukuda, Muneyuki, Kimizuka, Heita
• Format: Patent
• Language: English
• Published: 11.02.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

A computing unit generates a to-be-used-in-computation netlist on the basis of a to-be-used-in-calculation device model corresponding to a correction sample, estimates a first application result, on the basis of the to-be-used-in-computation netlist and an optical condition, when a charged particle...