Method of Manufacturing a Semiconductor Device and Semiconductor Device

• Main Authors: Strack, Helmut, Stegner, Andre Rainer, Konrath, Jens Peter, Schulze, Hans-Joachim
• Format: Patent
• Language: English
• Published: 14.01.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A method of manufacturing a semiconductor device is proposed. A silicon carbide, SiC, semiconductor body is provided. Ions are introduced into the SiC semiconductor body through a first surface of the SiC semiconductor body by at least one ion implantation process. Thereafter, a SiC device layer is...