METHOD FOR MANUFACTURING A PLURALITY OF RESONATORS

A method of manufacturing a plurality of resonators, each formed by a membrane sealing a cavity, includes forming a plurality of cavities starting from one face called the front face of a support substrate, the plurality of cavities comprising central cavities and peripheral cavities arranged around...

Full description

Saved in:
Bibliographic Details
Main Authors FAIN, Bruno, COUTIER, Caroline
Format Patent
LanguageEnglish
Published 10.12.2020
Subjects
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
TRANSPORTING
Online AccessGet full text

Cover

Abstract A method of manufacturing a plurality of resonators, each formed by a membrane sealing a cavity, includes forming a plurality of cavities starting from one face called the front face of a support substrate, the plurality of cavities comprising central cavities and peripheral cavities arranged around the assembly formed by the central cavities, and forming central membranes and peripheral membranes covering the central cavities and peripheral cavities, respectively, by the transfer of a coverage film on the front face of the support substrate. At least part of the peripheral membranes is removed.
AbstractList A method of manufacturing a plurality of resonators, each formed by a membrane sealing a cavity, includes forming a plurality of cavities starting from one face called the front face of a support substrate, the plurality of cavities comprising central cavities and peripheral cavities arranged around the assembly formed by the central cavities, and forming central membranes and peripheral membranes covering the central cavities and peripheral cavities, respectively, by the transfer of a coverage film on the front face of the support substrate. At least part of the peripheral membranes is removed.
Author FAIN, Bruno
COUTIER, Caroline
Author_xml – fullname: FAIN, Bruno
– fullname: COUTIER, Caroline
BookMark eNrjYmDJy89L5WQw8nUN8fB3UXDzD1LwdfQLdXN0DgkN8vRzV3BUCPAJDXL08QyJVPB3UwhyDfb3cwzxDwrmYWBNS8wpTuWF0twMym6uIc4euqkF-fGpxQWJyal5qSXxocFGBkYGxhamRmZGjobGxKkCAChWKa8
ContentType Patent
DBID EVB
DatabaseName esp@cenet
DatabaseTitleList
Database_xml – sequence: 1
  dbid: EVB
  name: esp@cenet
  url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP
  sourceTypes: Open Access Repository
DeliveryMethod fulltext_linktorsrc
Discipline Medicine
Chemistry
Sciences
ExternalDocumentID US2020385262A1
GroupedDBID EVB
ID FETCH-epo_espacenet_US2020385262A13
IEDL.DBID EVB
IngestDate Fri Jul 19 14:44:00 EDT 2024
IsOpenAccess true
IsPeerReviewed false
IsScholarly false
Language English
LinkModel DirectLink
MergedId FETCHMERGED-epo_espacenet_US2020385262A13
Notes Application Number: US202016891340
OpenAccessLink https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20201210&DB=EPODOC&CC=US&NR=2020385262A1
ParticipantIDs epo_espacenet_US2020385262A1
PublicationCentury 2000
PublicationDate 20201210
PublicationDateYYYYMMDD 2020-12-10
PublicationDate_xml – month: 12
  year: 2020
  text: 20201210
  day: 10
PublicationDecade 2020
PublicationYear 2020
RelatedCompanies COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
RelatedCompanies_xml – name: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
Score 3.3009422
Snippet A method of manufacturing a plurality of resonators, each formed by a membrane sealing a cavity, includes forming a plurality of cavities starting from one...
SourceID epo
SourceType Open Access Repository
SubjectTerms MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
TRANSPORTING
Title METHOD FOR MANUFACTURING A PLURALITY OF RESONATORS
URI https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20201210&DB=EPODOC&locale=&CC=US&NR=2020385262A1
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3dS8MwED_GFPVNp-LHlIDSt2LbZG19GNL1gyG2HWsr82msbQoD6Yar-O97CZ3uaW9JDi4f8Mt95O4C8EgNfYFyqFIRTExlllaodsUKlVFWlKVeLbh0XYSROc7Y62ww68DnNhdG1gn9kcUREVEF4r2R9_X634nlydjKzVO-xKHVS5AOPaW1jg1RoUxTvNHQn8Re7CquO8wSJZpKGrUHhmk4aCsdoCJtCTz47yORl7LeFSrBKRxOkF_dnEGH1z04drd_r_XgKGyfvLHZom9zDkbop-PYI2i4kdCJssBx00xEMxCHTN4y8flx-kHigOCpxpGTxtPkAh4CP3XHKk4-_9vrPEt2V0ovoVuvan4FRB9wRq2KIyYtxkrzORfKTlUuTMptg-bX0N_H6WY_-RZORFfEaehaH7rN1ze_Q2nb5PfykH4BC2N9AQ
link.rule.ids 230,309,783,888,25576,76876
linkProvider European Patent Office
linkToHtml http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3dS8MwED_GFOebTsWPqQWlb8W1ydr5MKTrB1XXdmypzKfRjxQE6Yar-O97CZvuaW8hB5fk4Je7S-4D4J4Yeop6qNQQTFSjVjfX-iXNNUpoXhR6mXL5dBFGZpDQl1lv1oDPTS6MrBP6I4sjIqJyxHst7-vl_yOWK2MrVw_ZB04tnnw2cNW1d2yICmVd1R0OvHHsxo7qOINkqkYTSSP9nmEaNvpKe2hkWwIP3ttQ5KUst5WKfwT7Y-RX1cfQ4FUbWs6m91obDsL1lzcO1-hbnYAReiyIXQUdNyW0o8S3HZaIaAbFVsajRDQ_Zu9K7Cso1TiyWTyZnsKd7zEn0HDx-d9Z58l0e6fkDJrVouLnoOg9TolVcsSkRWlhPmbC2CmL1CS8b5DsAjq7OF3uJt9CK2DhaD56jl6v4FCQRMyG3u1As_765teoeevsRgrsFxQEf_Q
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=METHOD+FOR+MANUFACTURING+A+PLURALITY+OF+RESONATORS&rft.inventor=FAIN%2C+Bruno&rft.inventor=COUTIER%2C+Caroline&rft.date=2020-12-10&rft.externalDBID=A1&rft.externalDocID=US2020385262A1