MICROMECHANICAL DEVICE INCLUDING A COVERING BOND FRAME
A micromechanical device that includes a substrate, a functional layer, and a cap that are situated one above the other in parallel to a main plane of extension. A cavity that is surrounded by a bond frame that extends in parallel to the main plane of extension is formed in the functional layer, the...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
16.07.2020
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Subjects | |
Online Access | Get full text |
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Summary: | A micromechanical device that includes a substrate, a functional layer, and a cap that are situated one above the other in parallel to a main plane of extension. A cavity that is surrounded by a bond frame that extends in parallel to the main plane of extension is formed in the functional layer, the cap being connected to the bond frame. The cavity is situated partially between the bond frame and the substrate in a direction perpendicular to the main plane of extension. A method for manufacturing a micromechanical device is also provided. |
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Bibliography: | Application Number: US201816648365 |