MEMS ELECTROSTATIC ACTUATOR WITH LINEARIZED DISPLACEMENTS

• Main Authors: MCDONALD, WILLIAM CRAIG, HALL, JAMES NORMAN
• Format: Patent
• Language: English
• Published: 02.07.2020
• Subjects: CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

A microelectromechanical actuator for a light beam steering device is provided that includes memory cells coupled to at least one electronic circuitry component and electrode segments coupled to a respective one of the memory cells via the at least one electronic circuitry component. A flexible meta...