OPTIMIZATION OF INTEGRATED CIRCUIT RELIABILITY

A per-chip equivalent oxide thickness (EOT) circuit sensor resides in an integrated circuit. The per-chip EOT circuit sensor determines electrical characteristics of the integrated circuit. The measured electrical characteristics include leakage current. The determined electrical characteristics are...

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Bibliographic Details
Main Authors Massey, Deborah M, Graas, Carole D, Yashchin, Emmanuel, Wu, Ernest Y, Habib, Nazmul, Nsame, Pascal A, Massey, John G
Format Patent
LanguageEnglish
Published 05.03.2020
Subjects
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Summary:A per-chip equivalent oxide thickness (EOT) circuit sensor resides in an integrated circuit. The per-chip EOT circuit sensor determines electrical characteristics of the integrated circuit. The measured electrical characteristics include leakage current. The determined electrical characteristics are used to determine physical attributes of the integrated circuit. The physical attributes, including EOT, are used in a reliability model to predict per-chip failure rate.
Bibliography:Application Number: US201916676635