METHOD FOR PRODUCING AN INTEGRATED CIRCUIT, INTEGRATED CIRCUIT, X-RAY DETECTOR AND X-RAY DEVICE

• Main Authors: HOSEMANN, Michael, VIEHWEGER, Kay
• Format: Patent
• Language: English
• Published: 24.10.2019
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A method is for producing an integrated circuit. In an embodiment, a metallic contact structure, for a through silicon via with a contact area, is applied onto a silicon substrate without an insulating intermediate layer. An interconnection structure, with at least one insulating layer and at least...