LITHOGRAPHIC HOTSPOT DETECTION USING MULTIPLE MACHINE LEARNING KERNELS

• Main Authors: Lin, Geng-He, Yu, Yen-Ting, Jiang, Hui-Ru, Chiang, Charles C
• Format: Patent
• Language: English
• Published: 19.09.2019
• Subjects: CALCULATING; COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS; COMPUTING; COUNTING; HANDLING RECORD CARRIERS; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL; PHYSICS; PRESENTATION OF DATA; RECOGNITION OF DATA; RECORD CARRIERS

A hotspot detection system that classifies a set of hotspot training data into a plurality of hotspot clusters according to their topologies, where the hotspot clusters are associated with different hotspot topologies, and classifies a set of non-hotspot training data into a plurality of non-hotspot clusters according to their topologies, where the non-hotspot clusters are associated with different topologies. The system extracts topological and non-topological critical features from the hotspot clusters and centroids of the non-hotspot clusters. The system also creates a plurality of kernels configured to identify hotspots, where each kernel is constructed using the extracted critical features of the non-hotspot clusters and the extracted critical features from one of the hotspot clusters, and each kernel is configured to identify hotspot topologies different from hotspot topologies that the other kernels are configured to identify.