EVALUATING AN OBJECT
A method for evaluating an object, the method may include acquiring, by a charged particle beam system, an image of an area of a reference object, wherein the area includes multiple instances of a structure of interest, and the structure of interest is of a nanometric scale; determining multiple typ...
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Main Authors | , , , , , , , , , |
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Format | Patent |
Language | English |
Published |
21.03.2019
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Subjects | |
Online Access | Get full text |
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Abstract | A method for evaluating an object, the method may include acquiring, by a charged particle beam system, an image of an area of a reference object, wherein the area includes multiple instances of a structure of interest, and the structure of interest is of a nanometric scale; determining multiple types of attributes from the image; reducing a number of the attributes to provide reduced attribute information; generating guidelines, based on the reduced attribute information and on reference data, for evaluating the reduced attribute information; and evaluating an actual object by implementing the guidelines. |
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AbstractList | A method for evaluating an object, the method may include acquiring, by a charged particle beam system, an image of an area of a reference object, wherein the area includes multiple instances of a structure of interest, and the structure of interest is of a nanometric scale; determining multiple types of attributes from the image; reducing a number of the attributes to provide reduced attribute information; generating guidelines, based on the reduced attribute information and on reference data, for evaluating the reduced attribute information; and evaluating an actual object by implementing the guidelines. |
Author | Attal, Shay Katzir, Ron Ben-Zikri, Kfir Cohen, Shaul Moldovan, Lee Baram, Mor Zac, Noam Maoz, Guy Schwarzband, Ishai Girmonsky, Doron |
Author_xml | – fullname: Maoz, Guy – fullname: Zac, Noam – fullname: Ben-Zikri, Kfir – fullname: Attal, Shay – fullname: Baram, Mor – fullname: Moldovan, Lee – fullname: Girmonsky, Doron – fullname: Katzir, Ron – fullname: Schwarzband, Ishai – fullname: Cohen, Shaul |
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Snippet | A method for evaluating an object, the method may include acquiring, by a charged particle beam system, an image of an area of a reference object, wherein the... |
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SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING |
Title | EVALUATING AN OBJECT |
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