SEMICONDUCTOR DEVICE

• Main Authors: Cho, Edward Nam-kyu, Kwon, Tae-soon, Lim, Bo-ra, Lee, Jeong-yun
• Format: Patent
• Language: English
• Published: 11.10.2018
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A semiconductor device includes: a fin-type active region protruding from a substrate and extending in a first direction; at least one nano-sheet spaced apart from an upper surface of the fin-type active region and facing the upper surface of the fin-type active region, the at least one nano-sheet h...