OPTICALLY ALIGNED HYBRID SEMICONDUCTOR DEVICE AND METHOD
Two semiconductor chips are optically aligned to form a hybrid semiconductor device. Both chips have optical waveguides and alignment surface positioned at precisely-defined complementary vertical offsets from optical axes of the corresponding waveguides, so that the waveguides are vertically aligne...
Saved in:
Main Authors | , , , , , , , |
---|---|
Format | Patent |
Language | English |
Published |
22.02.2018
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Abstract | Two semiconductor chips are optically aligned to form a hybrid semiconductor device. Both chips have optical waveguides and alignment surface positioned at precisely-defined complementary vertical offsets from optical axes of the corresponding waveguides, so that the waveguides are vertically aligned when one of the chips is placed atop the other with their alignment surface abutting each other. The position of the at least one of the alignment surface in a layer stack of its chip is precisely defined by epitaxy. The chips are bonded at offset bonding pads with the alignment surfaces abutting in the absence of bonding material therebetween. |
---|---|
AbstractList | Two semiconductor chips are optically aligned to form a hybrid semiconductor device. Both chips have optical waveguides and alignment surface positioned at precisely-defined complementary vertical offsets from optical axes of the corresponding waveguides, so that the waveguides are vertically aligned when one of the chips is placed atop the other with their alignment surface abutting each other. The position of the at least one of the alignment surface in a layer stack of its chip is precisely defined by epitaxy. The chips are bonded at offset bonding pads with the alignment surfaces abutting in the absence of bonding material therebetween. |
Author | Nuttall Nathan A Blumenthal Daniel J Novack Ari Jason Klein Holger N Desai Kishor V Hochberg Michael J Kinghorn David Henry Shi Ruizhi |
Author_xml | – fullname: Klein Holger N – fullname: Blumenthal Daniel J – fullname: Shi Ruizhi – fullname: Nuttall Nathan A – fullname: Hochberg Michael J – fullname: Desai Kishor V – fullname: Novack Ari Jason – fullname: Kinghorn David Henry |
BookMark | eNrjYmDJy89L5WSw8A8I8XR29PGJVHD08XT3c3VR8Ih0CvJ0UQh29fV09vdzCXUO8Q9ScHEN83R2VXD0c1HwdQ3x8HfhYWBNS8wpTuWF0twMym6uIc4euqkF-fGpxQWJyal5qSXxocFGBoYWBqZGRpYGjobGxKkCABD1KxU |
ContentType | Patent |
DBID | EVB |
DatabaseName | esp@cenet |
DatabaseTitleList | |
Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Medicine Chemistry Sciences Physics |
ExternalDocumentID | US2018052290A1 |
GroupedDBID | EVB |
ID | FETCH-epo_espacenet_US2018052290A13 |
IEDL.DBID | EVB |
IngestDate | Fri Jul 19 16:36:20 EDT 2024 |
IsOpenAccess | true |
IsPeerReviewed | false |
IsScholarly | false |
Language | English |
LinkModel | DirectLink |
MergedId | FETCHMERGED-epo_espacenet_US2018052290A13 |
Notes | Application Number: US201715783263 |
OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20180222&DB=EPODOC&CC=US&NR=2018052290A1 |
ParticipantIDs | epo_espacenet_US2018052290A1 |
PublicationCentury | 2000 |
PublicationDate | 20180222 |
PublicationDateYYYYMMDD | 2018-02-22 |
PublicationDate_xml | – month: 02 year: 2018 text: 20180222 day: 22 |
PublicationDecade | 2010 |
PublicationYear | 2018 |
RelatedCompanies | Elenion Technologies, LLC |
RelatedCompanies_xml | – name: Elenion Technologies, LLC |
Score | 3.1388383 |
Snippet | Two semiconductor chips are optically aligned to form a hybrid semiconductor device. Both chips have optical waveguides and alignment surface positioned at... |
SourceID | epo |
SourceType | Open Access Repository |
SubjectTerms | BASIC ELECTRIC ELEMENTS CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE |
Title | OPTICALLY ALIGNED HYBRID SEMICONDUCTOR DEVICE AND METHOD |
URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20180222&DB=EPODOC&locale=&CC=US&NR=2018052290A1 |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3dT8IwEL8Q_HxT1KCiaaLZ2yKUbW4Pi4G2OAxsBDYCT2QdW2JiBnEz_vu2FZQnHnuXXK5Nr3fX3v0K8NiUUT5vmzrPsKkb6ZLrjoGX-jN3WrbYIDhWvTBD3_Ii421mzirwse2FUTih3wocUVhUIuy9VOf1-v8Si6rayuKJvwvS6qUXulTbZMcSzgxjjXZdNgpoQDRC3Gii-eNfninBzTsiVzqQgbRE2mfTruxLWe86ld4ZHI6EvLw8h0qa1-CEbP9eq8HxcPPkXYMjVaOZFIK4scPiAuxgFEogg8EcdQb9V59R5M1lnQyayHUNfBqRMBgjyqZ9wlDHp2jIQi-gl_DQYyHxdKHM4m_ui2iyq3n7Cqr5Kk_rgGKTm9hpYStrpgaPLdviTmLgNG5lNo4NfA2NfZJu9rNv4VQOVe82bkC1_PxK74T3Lfm9WrQfxbeBaA |
link.rule.ids | 230,309,786,891,25594,76906 |
linkProvider | European Patent Office |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3dT8IwEL8Q_MA3RQ0qahPN3hahbGN7IGa0w6H7ILAReCIrjMTEDCIz_vu2dShPvN4ll-ul17tr734FeGyILJ-1dJUtsa5q6YKploYXaptZTZNvEJzIWRg_MNxYe53okxJ8bGdhJE7otwRH5B415_6ey_N6_X-JRWVv5eaJvXPS6rkXdahSVMcCzgxjhXY7ziCkIVEI6cQjJRj-8nQBbm7zWumgLfB5RfI07oq5lPVuUOmdwuGAy8vyMyilWRUqZPv3WhWO_eLJuwpHskdzvuHEwg8352CGg0gAGXhTZHv9l8ChyJ2KPhk0EnYNAxqTKBwi6oz7xEF2QJHvRG5IL-Ch50TEVbkys7-1z-LRruatSyhnqyytAUp0pmOriY1lI9VYYpgGs-YaTpPm0sSJhq-gvk_S9X72PVTcyPdmXj94u4ETwZJz3LgO5fzzK73lkThnd9KAP_uZhFU |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=OPTICALLY+ALIGNED+HYBRID+SEMICONDUCTOR+DEVICE+AND+METHOD&rft.inventor=Klein+Holger+N&rft.inventor=Blumenthal+Daniel+J&rft.inventor=Shi+Ruizhi&rft.inventor=Nuttall+Nathan+A&rft.inventor=Hochberg+Michael+J&rft.inventor=Desai+Kishor+V&rft.inventor=Novack+Ari+Jason&rft.inventor=Kinghorn+David+Henry&rft.date=2018-02-22&rft.externalDBID=A1&rft.externalDocID=US2018052290A1 |