APPLYING RF ENERGY ACCORDING TO TIME VARIATIONS IN EM FEEDBACK

A method includes processing an object in a cavity by applying radio frequency (RF) energy to the cavity. A first plurality of frequencies is identified, characterized in that a time derivative of a value indicative of a dielectric response of the cavity to RF energy at frequency of the first plural...

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Bibliographic Details
Main Authors YEHEZKELY Hertzel, IBRAGIMOV Zalman, RAPPEL Amit, ELBOIM Ram, HADAD Sharon, LIBMAN Avner
Format Patent
LanguageEnglish
Published 18.01.2018
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Summary:A method includes processing an object in a cavity by applying radio frequency (RF) energy to the cavity. A first plurality of frequencies is identified, characterized in that a time derivative of a value indicative of a dielectric response of the cavity to RF energy at frequency of the first plurality of frequencies is larger than a first threshold. More energy is applied at frequencies of the first plurality of frequencies than at other frequencies.
Bibliography:Application Number: US201715718444