DUAL POWER FEED ROTARY SPUTTERING CATHODE

A rotary sputtering cathode assembly is provided that comprises a rotatable target cylinder having a first end and an opposing second end. A first power transfer apparatus is configured to carry radio frequency power to the first end of the target cylinder, and a second power transfer apparatus is c...

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Bibliographic Details
Main Authors Crowley Daniel Theodore, Morse Patrick Lawrence
Format Patent
LanguageEnglish
Published 28.09.2017
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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