LOAD PORT AND LOAD PORT ATMOSPHERE REPLACING METHOD

• Main Authors: OKUTSU Hidekazu, SAKATA Katsunori
• Format: Patent
• Language: English
• Published: 22.06.2017
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Provided is a load port capable of loading and unloading a substrate by a transfer robot in a state where a purge gas atmosphere is maintained inside a substrate storage space. After the lid of the substrate storage container is opened, an opening portion of the substrate storage container is closed...